4.5 Article Proceedings Paper

Irradiation-induced defects in SiGe

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ELSEVIER
DOI: 10.1016/j.mseb.2008.08.003

Keywords

SiGe; Defects; Irradiation; DLTS

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A review is presented on irradiation-induced vacancy-type defects in relaxed Si1-xGex. The emphasis is put on results extracted from deep-level transient spectroscopy (DLTS) investigations of the vacancy, the di-vacancy, the oxygen-vacancy pair (the A-center) and the group-V-vacancy pair (the E-center). The positions of the associated levels in the band gap will in particular be followed as a function of the Ge content and, consequently, of the monotonic decrease of the band gap. (C) 2008 Elsevier B.V. All rights reserved.

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