The application of focused ion beam microscopy in the material sciences

This paper describes the application of focused ion beam microscopy in the characterisation of materials. The paper is of a tutorial nature whose aim is to assist the novice user in acquiring high quality, artefact-free data. The design of FIBs is described, together with a brief background on the interactions which occur between the incident ion beam and the specimen. The use of focused ion beam microscopy in a wide range of materials science applications, including specimen preparation methods and in the generation of 3D visualisation is described. Crown Copyright (C) 2008 Published by Elsevier Inc. All rights reserved.