Characterization of nano-layered multilayer coatings using modified Bragg law

In this paper, the modified Bragg law is used to characterize nano-layered multilayer coatings having two or four different layer constituents based on measured low-angle X-ray diffraction spectra. Comparisons of the modulation periods measured directly from TEM micrographs, and determined by the modified Bragg law, indicate that low-angle X-ray diffraction technique is a reliable method in characterizing nano-layered multilayer structures. However, a proper application of the modified Bragg law relies on the correct identification of the order of reflection peaks, which is not a straightforward process under certain circumstances. A practical approach has been recommended to address this issue. Furthermore, the appearance of extra peaks is discussed in this paper. Crown Copyright (C) 2007 Published by Elsevier Inc. All rights reserved.