On-chip microrobot for investigating the response of aquatic microorganisms to mechanical stimulation

In this paper, we propose a novel, magnetically driven microrobot equipped with a frame structure to measure the effects of stimulating aquatic microorganisms. The design and fabrication of the force-sensing structure with a displacement magnification mechanism based on beam deformation are described. The microrobot is composed of a Si-Ni hybrid structure constructed using micro-electro-mechanical system (MEMS) technologies. The microrobots with 5 mu m-wide force sensors are actuated in a microfluidic chip by permanent magnets so that they can locally stimulate the microorganisms with the desired force within the stable environment of the closed microchip. They afford centimetre-order mobility (untethered drive) and millinewton-order forces (high power) as well as force-sensing. Finally, we apply the developed microrobots for the quantitative evaluation of the stimuation of Pleurosira laevis (P. laevis) and determine the relationship between the applied force and the response of a single cell.