Journal
LAB ON A CHIP
Volume 11, Issue 16, Pages 2670-2672Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/c1lc20103d
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Funding
- Spanish Ministerio de Ciencia y Tecnologia [TEC2009-9008]
- CAIB Government [ECT044/09]
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Water vapor sensing characterization of a metal resonator fabricated with an industrial 0.35 mu m CMOS technology is reported. The resonator frequency is similar to 13.2 MHz and exhibits a sensitivity magnitude of similar to 3.5 kHz per %RH without requiring any additional hygroscopic coating layer. An on-chip integrated oscillator circuit enables an unprecedented resolution of 0.005 %RH.
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