Journal
LAB ON A CHIP
Volume 9, Issue 16, Pages 2391-2394Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/b902159k
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Microfluidic researches are now resorting to advanced micro-nanoprocessing technologies for production of more functional lab-on-a-chip'' systems. However, two-photon polymerization (TPP), a powerful designable micro-nanofabrication approach, has not been put to use on the exciting field, largely due to the difficulties in forming buried channels. Here, we solve the problem by TPP prototyping of nanoshells, for which the usage of the negative tone resin SU-8 is found critical. The fabrication efficiency improved by orders of magnitude, together with the prospect of integration of movable micro-mechanical and optical components into the chip would make TPP a promising enabling tool for the micro-analytical systems. Finally, a 25 mu m length functional microvalve in a microfluidic channel was rapidly realized and its ON'' and OFF'' states were tested.
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