Journal
LAB ON A CHIP
Volume 9, Issue 14, Pages 1994-1996Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/b904769g
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Funding
- National Basic Research Program (973 Program) of China [2007CB714505]
- Ministry of Education of China [20080031012]
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A new method of anisotropic etching an amorphous bulk material is proposed in this paper. Laminar flow is employed in this method to mask the flow of an etchant and is termed as liquid etch mask. Since this mask has the physical properties of a liquid, it brings several advantages that could not be achieved by any kind of other etch mask in the solid phase. As a consequence, the aspect ratio of the glass channel could be improved to similar to 1 while in an inexpensive and convenient manner.
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