Journal
LAB ON A CHIP
Volume 9, Issue 4, Pages 586-591Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/b809370a
Keywords
-
Categories
Funding
- Korea Institute of Science and Technology - Intelligent Microsystems Center (KIST-IMC)
- NIH [EB005743]
- NATIONAL INSTITUTE OF BIOMEDICAL IMAGING AND BIOENGINEERING [R01EB005743] Funding Source: NIH RePORTER
Ask authors/readers for more resources
Many fabrication technologies have been used to build nano/mesoporous materials/filters with a good size control, but the integration of these systems into a microsystem format has been a challenge. Microfabricated nanofilters suffer from small open volume and low-throughput. In this paper, we developed a novel fabrication strategy for generating massively-parallel, regular vertical nanochannel membranes with a uniform, well-controlled gap size of similar to 50 nm and a depth up to similar to 40 mu m, by using only standard semiconductor fabrication techniques. The vertical nanofilter membranes were fabricated into an anisotropic nanofilter array, which demonstrates the ability to integrate nanofilters and micron-sized channels/pores seamlessly. We demonstrated efficient continuous-flow separation of large DNAs and small molecules in a two-dimensional vertical nanochannel array device. These ultra-high-aspect-ratio nanochannels have the advantage of large open volume, enabling high-throughput applications.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available