Journal
JOURNAL OF ZHEJIANG UNIVERSITY-SCIENCE C-COMPUTERS & ELECTRONICS
Volume 14, Issue 4, Pages 258-263Publisher
ZHEJIANG UNIV
DOI: 10.1631/jzus.C12MNT04
Keywords
High temperature co-fired ceramic (HTCC); Wireless; Micro-electro-mechanical systems (MEMS)
Categories
Funding
- National Basic Research Program (973) of China [2010CB334703]
- National Natural Science Foundation of China [51075375]
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High temperature co-fired ceramics (HTCCs) have wide applications with stable mechanical properties, but they have not yet been used to fabricate sensors. By introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity, the designed sensors made from HTCC materials (zirconia and 96% alumina) are fabricated, and their capacities for the pressure measurement are tested using a wireless interrogation method. Using the fabricated sensor, a study is conducted to measure the atmospheric pressure in a sealed vessel. The experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 cm. The described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments.
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