Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 1, Pages 11-14Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/1.3039684
Keywords
-
Ask authors/readers for more resources
This work focuses on dipole antenna-coupled metal-oxide-metal diodes, which can be used for the detection of long wave infrared radiation. These detectors are defined using electron beam lithography and fabricated with shadow evaporation metal deposition. Along with offering complementary metal oxide semiconductor compatible fabrication, these detectors promise high speed and frequency selective detection without biasing, a small pixel footprint, and full functionality at room temperature without cooling. Direct current current-voltage characteristics are presented along with detector response to 10.6 mu m radiation. The detection characteristics can be tailored to provide for multispectral imaging in specific applications by modifying device geometries. (C) 2009 American Vacuum Society. [DOI: 10.1116/1.3039684]
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available