Related references
Note: Only part of the references are listed.Efficient coupling to W1 photonic crystal waveguide on InP membrane through suspended access guides
A. Talneau et al.
APPLIED PHYSICS LETTERS (2008)
Sidewall passivation assisted by a silicon coverplate during Cl2-H2 and HBr inductively coupled plasma etching of InP for photonic devices
S. Bouchoule et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2008)
Detailed analysis of the influence of an inductively coupled plasma reactive-ion etching process on the hole depth and shape of photonic crystals in InP/InGaAsP
P. Strasser et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2007)
Characterization of the feature-size dependence in Ar/Cl2 chemically assisted ion beam etching of InP-based photonic crystal devices
A. Berrier et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2007)
Optimization of a Cl2-H2 inductively coupled plasma etching process adapted to nonthermalized InP wafers for the realization of deep ridge heterostructures
S. Guilet et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2006)
Detailed analysis by Fabry-Perot method of slab photonic crystal line-defect waveguides and cavities in aluminium-free material system
S. Combrie et al.
OPTICS EXPRESS (2006)
Ultrahigh-Q photonic crystal nanocavities realized by the local width modulation of a line defect -: art. no. 041112
E Kuramochi et al.
APPLIED PHYSICS LETTERS (2006)
Disorder-induced scattering loss of line-defect waveguides in photonic crystal slabs
E Kuramochi et al.
PHYSICAL REVIEW B (2005)
Mapping the optical properties of slab-type two-dimensional photonic crystal waveguides
E Dulkeith et al.
PHYSICAL REVIEW B (2005)
Ultrafast carrier dynamics in InP photonic crystals
JF Holzman et al.
NANOTECHNOLOGY (2005)
High-aspect-ratio chemically assisted ion-beam etching for photonic crystals using a high beam voltage-current ratio
MV Kotlyar et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2004)
Inductively coupled Cl2/Ar plasma:: Experimental investigation and modeling
AM Efremov et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2003)
Compound cavity measurement of transmission and reflection of a tapered single-line photonic-crystal waveguide
A Talneau et al.
APPLIED PHYSICS LETTERS (2003)
Theoretical investigation of a two-dimensional photonic crystal slab with truncated cone air holes
Y Tanaka et al.
APPLIED PHYSICS LETTERS (2003)
Sidewall passivation of GaAs in BCl3-containing atmospheres
G Franz et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2001)