Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 6, Pages 2421-2425Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/1.2993172
Keywords
diamond; diffraction gratings; masks; nanolithography; nanoparticles; particle size; surface plasmons
Ask authors/readers for more resources
A nanolithography technique based on metal transfer printing is demonstrated. The transferred metal conveniently acts as an etch mask for pattern transfer to a substrate. This lithography technique can be used on flexible plastic substrate as well as on rigid substrate due to the low pressure and temperature used in the metal transfer process. Dense nanosize metal particle arrays with different shapes such as square, diamond, and nanobar were created with high yield over large area, and localized surface plasmon spectra of those particle arrays were measured. Pattern linewidth was reduced to 50 nm in metal grating by depositing metals on the poly(dimethysiloxane) grating sidewall using a shadow evaporation process.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available