Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 6, Pages 2103-2106Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/1.2993262
Keywords
focused ion beam technology; ion microscopy; particle backscattering; probability
Ask authors/readers for more resources
The newly developed helium ion microscope is an instrument well suited to high resolution surface specific imaging with several unique contrast mechanisms. In addition to its imaging capabilities, the focused helium ion beam (subnanometer in size) has recently been used for elemental analysis. The scattering probability, angular distribution, and recoil energy combine to provide valuable information about the specimen being analyzed.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available