Related references
Note: Only part of the references are listed.A strategy for increased carbon ionization in magnetron sputtering discharges
Asim Aijaz et al.
DIAMOND AND RELATED MATERIALS (2012)
Ion mass spectrometry investigations of the discharge during reactive high power pulsed and direct current magnetron sputtering of carbon in Ar and Ar/N2
S. Schmidt et al.
JOURNAL OF APPLIED PHYSICS (2012)
High power impulse magnetron sputtering discharge
J. T. Gudmundsson et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2012)
Understanding deposition rate loss in high power impulse magnetron sputtering: I. Ionization-driven electric fields
N. Brenning et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2012)
Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films
K. Sarakinos et al.
SURFACE & COATINGS TECHNOLOGY (2012)
Temporal Evolution of the Ion Fluxes for Various Elements in HIPIMS Plasma Discharge
Ante Hecimovic et al.
IEEE TRANSACTIONS ON PLASMA SCIENCE (2011)
Plasma Deposition of Diamond-Like Carbon
John Robertson
JAPANESE JOURNAL OF APPLIED PHYSICS (2011)
Discharge physics of high power impulse magnetron sputtering
Andre Anders
SURFACE & COATINGS TECHNOLOGY (2011)
Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time- and space-resolved optical emission spectroscopy and fast imaging
M. Hala et al.
JOURNAL OF APPLIED PHYSICS (2010)
ERD analysis and modification of TiO2 thin films with heavy ions
J. Jensen et al.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2010)
Interpretation of electron diffraction patterns from amorphous and fullerene-like carbon allotropes
Zsolt Czigany et al.
ULTRAMICROSCOPY (2010)
Time and energy resolved ion mass spectroscopy studies of the ion flux during high power pulsed magnetron sputtering of Cr in Ar and Ar/N2 atmospheres
G. Greczynski et al.
VACUUM (2010)
Electron Diffraction Based Analysis of Phase Fractions and Texture in Nanocrystalline Thin Films, Part II: Implementation
Janos L. Labar
MICROSCOPY AND MICROANALYSIS (2009)
Carbon atom and cluster sputtering under low-energy noble gas plasma bombardment
E. Oyarzabal et al.
JOURNAL OF APPLIED PHYSICS (2008)
Origins of ion energy distribution function (IEDF) in high power impulse magnetron sputtering (HIPIMS) plasma discharge
A. Hecimovic et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2008)
Chemical sputtering of carbon by combined exposure to nitrogen ions and atomic hydrogen
M. Schlueter et al.
NEW JOURNAL OF PHYSICS (2008)
Beyond β-C3N4-fullerene-like carbon nitride:: A promising coating material
Jorg Neidhardt et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2007)
The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge
J. Bohlmark et al.
THIN SOLID FILMS (2006)
Ionized physical vapor deposition (IPVD): A review of technology and applications
Ulf Helmersson et al.
THIN SOLID FILMS (2006)
First-principles calculations on the curvature evolution and cross-linkage in carbon nitride
GK Gueorguiev et al.
CHEMICAL PHYSICS LETTERS (2005)
Electronic structure of carbon nitride thin films studied by X-ray spectroscopy techniques
N Hellgren et al.
THIN SOLID FILMS (2005)
Experimental evidence of Penning ionization role in a low pressure direct current nitrogen glow discharge
J Nagai et al.
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS (2004)
Control of plasma parameters by using noble gas admixtures
KJ Taylor et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2004)
Correlated high resolution transmission electron microscopy and X-ray photoelectron spectroscopy studies of structured CNx (0 < x < 0.25) thin solid films
J Neidhardt et al.
CARBON (2004)
Structural, mechanical and tribological behavior of fullerene-like and amorphous carbon nitride coatings
J Neidhardt et al.
DIAMOND AND RELATED MATERIALS (2004)
Electron-temperature dependence of nitrogen dissociation in 915 MHz ECR plasma
N Itagaki et al.
THIN SOLID FILMS (2003)
Comparative study of target atomic number dependence of ion induced and electron induced secondary electron emission
K Ohya
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2003)
Imaging of fullerene-like structures in CNx thin films by electron microscopy;: sample preparation artefacts due to ion-beam milling
Z Czigány et al.
ULTRAMICROSCOPY (2003)
Fullerene-like carbon nitride:: A resilient coating material
L Hultman et al.
MRS BULLETIN (2003)
Diamond-like carbon coatings as biocompatible materials - an overview
A Grill
DIAMOND AND RELATED MATERIALS (2003)
Diagnostics of a N-2/Ar direct current magnetron discharge for reactive sputter deposition of fullerene-like carbon nitride thin films
J Neidhardt et al.
JOURNAL OF APPLIED PHYSICS (2003)
Spatial and temporal behavior of the plasma parameters in a pulsed magnetron discharge
JT Gudmundsson et al.
SURFACE & COATINGS TECHNOLOGY (2002)
Electrical properties of carbon nitride thin films: Role of morphology and hydrogen content
E Broitman et al.
JOURNAL OF ELECTRONIC MATERIALS (2002)
Ionization of carbon, nitrogen, and oxygen by electron impact
YK Kim et al.
PHYSICAL REVIEW A (2002)
Diamond-like amorphous carbon
J Robertson
MATERIALS SCIENCE & ENGINEERING R-REPORTS (2002)
Determination of the absolute partial and total cross sections for electron-impact ionization of the rare gases
R Rejoub et al.
PHYSICAL REVIEW A (2002)
A study of neon-nitrogen interactions in d.c. glow discharges by optical emission spectroscopy
JC Avelar-Batista et al.
THIN SOLID FILMS (2001)
Effect of chemical sputtering on the growth and structural evolution of magnetron sputtered CNx thin films
N Hellgren et al.
THIN SOLID FILMS (2001)
Preparation of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition
MC Polo et al.
DIAMOND AND RELATED MATERIALS (2000)
Growth, structure, and mechanical properties of CNxHy films deposited by dc magnetron sputtering in N-2/Ar/H-2 discharges
N Hellgren et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS (2000)