Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 27, Issue 5, Pages 1172-1177Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/1.3168557
Keywords
energy gap; ferromagnetic materials; grain size; magnetic semiconductors; magnetisation; optical constants; phonons; photoluminescence; semiconductor thin films; sputter deposition; titanium compounds; vacancies (crystal); wide band gap semiconductors
Funding
- National Science Foundation of China [50672064, 50701033]
- RFDP [20070056047]
- Natural Science Foundation of Tianjin City [06TXTJJC13900, 08JCY-BJC09400]
- Tianjin University [TJU-YFF-08B52, TJU-YFF-08A05]
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Structure, optical, and magnetic properties of the anatase Ti1-xFexO2-delta films fabricated by facing-target reactive sputtering were investigated. Structural analyses indicate that there are no impurity phases in the films and the grain size reaches maximum when Fe content x is 0.017. The optical band gap of the Ti1-xFexO2-delta films decreases with the increasing x. Photoluminescence (PL) spectra show that direct and indirect band-to-band transitions coexist, and the indirect radiative recombination can be regarded as a one photon and two phonon coupling courses. The PL intensity due to oxygen vacancies enhances and the refractive index of the fims increases with the increasing x. The Ti1-xFexO2-delta films exhibit room-temperature ferromagnetism due to the oxygen vacancies.
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