Journal
APPLIED PHYSICS LETTERS
Volume 106, Issue 11, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4915305
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Funding
- DFG [SPP1601/1, SFB TR21, FOR1493]
- Volkswagenstiftung
- EU (STREP Project DIADEMS)
- EU (ERC Synergy Grant BioQ)
- EU (EQuaM)
- Bundesministerium fur Bildung und Forschung (BMBF)
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Here we report the fabrication of stable, shallow (<5 nm) nitrogen-vacancy (NV) centers in diamond by nitrogen delta doping at the last stage of the chemical vapor deposition growth process. The NVs are stabilized after treating the diamond in SF6 plasma, otherwise the color centers are not observed, suggesting a strong influence from the surface. X-ray photoelectron spectroscopy measurements show the presence of only fluorine atoms on the surface, in contrast to previous studies, indicating very good surface coverage. We managed to detect hydrogen nuclear magnetic resonance signal from protons in the immersion oil, revealing a depth of the NVs of about 5 nm. (C) 2015 AIP Publishing LLC.
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