Journal
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 53, Issue 3, Pages 1580-1583Publisher
KOREAN PHYSICAL SOC
DOI: 10.3938/jkps.53.1580
Keywords
ITO; PC; carrier concentration; mobility
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Transparent films with low resistivity have been intensively investigated for display device applications, such as flat panel displays, solar cells and touch panels, because of their electrodes having low resistivity and high transparency. In this study, the optical and the electrical properties of ITO films synthesized by using a DC magnetron sputtering system with an ITO (SnO2 : 10 wt.%) target onto a glass, polycarbonate (PC) substrate at various oxygen gas flow rates were investigated and the surface morphologies of ITO thin films prepared at various film thicknesses were measured. As a result, ITO thin films could be prepared With resistivity of 5 similar to 8 x 10(-4) Omega-cm and a transmittance of 85 % at a wavelength of 550 nm.
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