Temperature and non-linear response of cantilever-type mechanical oscillators used in atomic force microscopes with interferometric detection

The sensitivity of atomic force microscopes is fundamentally limited by the cantilever temperature, which can be, in principle, determined by measuring its thermal spectrum and applying the equipartition theorem. However, the mechanical response can be affected by the light field inside the cavity of a Fabry-Perot interferometer due to light absorption, radiation pressure, photothermal forces, and laser noise. By evaluating the optomechanical Hamiltonian, we are able to explain the peculiar distance dependence of the mechanical quality factor as well as the appearance of thermal spectra with symmetrical Lorentzian as well as asymmetrical Fano line shapes. Our results can be applied to any type of mechanical oscillator in an interferometer-based detection system. (C) 2015 AIP Publishing LLC.