Journal
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
Volume 30, Issue 10, Pages 1973-1987Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.jeurceramsoc.2010.03.011
Keywords
Sintering; Substrate; Lamination; Patterning; LTCC
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Funding
- SIMTech
- Agency for Science, Technology and Research (A*STAR), Singapore
- NTU
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Three-dimensional structures in a multi-layer ceramic substrate are important in realizing ceramic-based meso- and micro-systems. During lamination and/or co-firing, three-dimensional structures, especially those with suspended structures, tend to deform and sag due to the intrinsic nature of the green (un-fired) ceramic material. Fabrication of three-dimensional structures with well-controlled dimensional stability and mechanical integrity remains a challenge. This paper discusses the challenges in fabricating structures in a multi-layer ceramic substrate. An overview is provided of the current state of the art in patterning and lamination techniques for the fabrication of these three-dimensional structures. (c) 2010 Elsevier Ltd. All rights reserved.
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