Journal
APPLIED PHYSICS LETTERS
Volume 107, Issue 19, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4935425
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Funding
- European Research Council under the European Union/ERC [339478]
- Aalto Energy Efficiency Research Programme
- Grants-in-Aid for Scientific Research [15H06901] Funding Source: KAKEN
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We have fabricated high-quality thin films of the transparent conducting anatase Nb:TiO2 on glass substrates through atomic layer deposition, and a subsequent reductive heat treatment of the as-deposited amorphous films. Hall-effect measurements and Drude-fitting of the Vis-NIR spectra indicate that for lightly doped films deposited at temperatures around 170 degrees C, grain boundary scattering becomes negligible and the mobility is predominately limited by phonon-electron scattering inherent to the anatase lattice and by impurities. Simultaneously, such lighter doping leads to reduced plasma absorption, thereby improving material's performance as a transparent conductor. (C) 2015 AIP Publishing LLC.
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