Journal
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
Volume 131, Issue 2, Pages 398-+Publisher
AMER CHEMICAL SOC
DOI: 10.1021/ja805319k
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- U.S. NSF [CMMI-0600600]
- Semiconductor Research Corporation
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Use of graphitic (hexabenzocoronene-derived) molecules produces cholesteric ribbons which serve as molecular resists in a fluorine plasma. This procedure allows the shape of the molecular assemblies to be etched into the underlying silicon, validating the concept of molecular resists.
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