Related references
Note: Only part of the references are listed.State-of-the-art silicon device miniaturization technology and its challenges
Changhwan Shin
IEICE ELECTRONICS EXPRESS (2014)
Controllable elastocapillary folding of three-dimensional micro-objects by through-wafer filling
A. Legrain et al.
JOURNAL OF APPLIED PHYSICS (2014)
Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass
Koji Sugioka et al.
LAB ON A CHIP (2014)
Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon
Erwin J. W. Berenschot et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2013)
Bioinspired Microorigami by Self-Folding Polymer Films
Leonid Ionov
MACROMOLECULAR CHEMISTRY AND PHYSICS (2013)
Wafer-scale fabrication of nanoapertures using corner lithography
Narges Burouni et al.
NANOTECHNOLOGY (2013)
Self-folding thin-film materials: From nanopolyhedra to graphene origami
Vivek B. Shenoy et al.
MRS BULLETIN (2012)
3D Nanofabrication of Fluidic Components by Corner Lithography
Erwin J. W. Berenschot et al.
SMALL (2012)
Self-folding of polymer sheets using local light absorption
Ying Liu et al.
SOFT MATTER (2012)
Self-folding devices and materials for biomedical applications
Christina L. Randall et al.
TRENDS IN BIOTECHNOLOGY (2012)
Soft microorigami: self-folding polymer films
Leonid Ionov
SOFT MATTER (2011)
Self-folding all-polymer thermoresponsive microcapsules
Georgi Stoychev et al.
SOFT MATTER (2011)
Curving Nanostructures Using Extrinsic Stress
Jeong-Hyun Cho et al.
ADVANCED MATERIALS (2010)
Elastocapillary fabrication of three-dimensional microstructures
J. W. van Honschoten et al.
APPLIED PHYSICS LETTERS (2010)
Three-Dimensional Fabrication at Small Size Scales
Timothy G. Leong et al.
SMALL (2010)
Capillarity induced folding of elastic sheets
C. Py et al.
EUROPEAN PHYSICAL JOURNAL-SPECIAL TOPICS (2009)
Hierarchical self-assembly of complex polyhedral microcontainers
David J. Filipiak et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2009)
Self-assembly from milli-to nanoscales: methods and applications
M. Mastrangeli et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2009)
Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment
H. V. Jansen et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2009)
Template-Assisted Three-Dimensional Nanolithography via Geometrically Irreversible Processing
Xindi Yu et al.
NANO LETTERS (2009)
Self-Assembly of Lithographically Patterned Nanoparticles
Jeong-Hyun Cho et al.
NANO LETTERS (2009)
Voxels: volume-enclosing microstructures
Rob Gagler et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2008)
Femtosecond laser micromachining in transparent materials
Rafael R. Gattass et al.
NATURE PHOTONICS (2008)
Challenges and breakthroughs in recent research on self-assembly
Katsuhiko Ariga et al.
SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS (2008)
Thin Film Stress Driven Self-Folding of Microstructured Containers
Timothy G. Leong et al.
SMALL (2008)
Surface tension-driven self-folding polyhedra
Timothy G. Leong et al.
LANGMUIR (2007)
Capillary Origami: Spontaneous wrapping of a droplet with an elastic sheet
Charlotte Py et al.
PHYSICAL REVIEW LETTERS (2007)
Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure
J. K. Luo et al.
SENSORS AND ACTUATORS A-PHYSICAL (2006)
Thin membrane self-alignment using nanomagnets for three-dimensional nanomanufacturing
Anthony J. Nichol et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2006)
Microhand for biological applications
Yen-Wen Lu et al.
APPLIED PHYSICS LETTERS (2006)
A design method for out-of-plane structures by multi-step magnetic self-assembly
E Iwase et al.
SENSORS AND ACTUATORS A-PHYSICAL (2006)
Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges
WJ Arora et al.
APPLIED PHYSICS LETTERS (2006)
Self-folding of three-dimensional hydrogel microstructures
JJ Guan et al.
JOURNAL OF PHYSICAL CHEMISTRY B (2005)
Behavior in electric fields of smart hydrogels with potential application as bio-inspired actuators
SJ Kim et al.
SMART MATERIALS AND STRUCTURES (2005)
Magnetic self-assembly of three-dimensional surfaces from planar sheets
M Boncheva et al.
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA (2005)
Out-of-plane high-Q inductors on low-resistance silicon
CL Chua et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2003)
Surface tension-powered self-assembly of micro structures - The state-of-the-art
RRA Syms et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2003)
Thermokinetic actuation for batch assembly of microscale hinged structures
V Kaajakari et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2003)
Replication molds having nanometer-scale shape control fabricated by means of oxidation and etching
GM Kim et al.
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY (2002)
Nanotechnology - Thin solid films roll up into nanotubes
OG Schmidt et al.
NATURE (2001)
Microorigami: Fabrication of small, three-dimensional, metallic structures
ST Brittain et al.
JOURNAL OF PHYSICAL CHEMISTRY B (2001)
Self-assembled 3-D silicon microscanners with self-assembled electrostatic drives
RRA Syms
IEEE PHOTONICS TECHNOLOGY LETTERS (2000)