Journal
APPLIED PHYSICS LETTERS
Volume 106, Issue 1, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4905353
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Funding
- JSPS KAKENHI [25.4829, 25420728]
- Amada Foundation [AF-2011215]
- MEXT
- Grants-in-Aid for Scientific Research [25420728, 13J04829] Funding Source: KAKEN
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Ablation rate dependence on laser fluence for copper subjected to oblique femtosecond laser irradiation has been determined experimentally in order to investigate processing induced by oblique irradiation. A difference of ablation rate between p-polarized and s-polarized oblique irradiation is clearly observed. Effective penetration depth is defined to explain the ablation rate dependence instead of using optical penetration depth, which is treated as a key value for determining the ablation rate in conventional theory. The effective penetration depth for copper is presented in simple formulas as a function of laser incidence angle for each polarization. (C) 2015 AIP Publishing LLC.
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