Journal
JOURNAL OF SYNCHROTRON RADIATION
Volume 15, Issue -, Pages 648-654Publisher
WILEY-BLACKWELL
DOI: 10.1107/S0909049508025685
Keywords
computed tomography; micro-CT; spatial resolution; FIB; MTF
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Funding
- Japan Synchrotron Radiation Research Institute (JASRI) [2007A2072, 2007B1894]
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A micro test pattern prepared by focused ion beam milling was used to evaluate the three-dimensional resolution of a microtomograph at the BL20B2 beamline of SPring-8. The resolutions along the direction within the tomographic slice plane and perpendicular to it were determined from the modulation transfer functions. The through-plane resolution perpendicular to the tomographic slice was evaluated to be 8 mu m, which corresponds to the spatial resolution of two-dimensional radiographs. In contrast, the in-plane resolution within the slice was evaluated to be 12 mu m. Real-space interpolation was performed prior to the tomographic reconstruction, giving an improved in-plane resolution of 8.5 mu m. However, the 8 mu m pitch pattern was resolved in the interpolated slice image. To reflect this result, another resolution measure from the peak-to-valley difference plot was introduced. This resolution measure gave resolution limits of 7.4 mu m for the in-plane direction and 6.1 mu m for the through-plane direction. The three-dimensional test pattern along with the interpolated reconstruction enables the quantitative evaluation of the spatial resolution of microtomographs.
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