Journal
JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES
Volume 3, Issue 3, Pages 331-337Publisher
MAIK NAUKA/INTERPERIODICA/SPRINGER
DOI: 10.1134/S102745100903001X
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- State Contract [02.513.11.3118]
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Titanium carbide-based coatings deposited by arc-technology in C(2)H(2)/Ar atmosphere were studied by X-ray photoelectron spectroscopy. It was found that, in addition to the cubic phase of TiC(x)O(y) oxycarbide, the films contain carbon in the amorphous, presumably graphite-like state. In carbon C1s spectra, bands at 282.0, 284.4, and 286.0 eV correspond to the TiC(x) state, amorphous carbon, and C-C bonds, respectively. The maximum at 283.0 eV was interpreted as the C state in titanium carbide nanoforms, i.e., Ti(14)C(13) clusters or Ti(8)C(14) carbohedra. The phase ratio was varied by coating deposition conditions, i.e., TiC/a-C deposition by Ti cathode sputtering in C(2)II(2)/Ar, and composite Ti/C target sputtering in Ar and C(2)II(2)/Ar. When using the Ti cathode and C(2)II(2)/Ar gas mixture, the ratio of carbide and amorphous a-C phases was estimated as 1 : 1; the surface layer similar to 15 nm thick was enriched with amorphous carbon. It was assumed that TiC/a-C composite coatings with an additional a-C film on the surface would have an increased stability in reaction media and good biocompatibility.
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