4.6 Article

Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

Journal

APPLIED PHYSICS LETTERS
Volume 107, Issue 3, Pages -

Publisher

AMER INST PHYSICS
DOI: 10.1063/1.4927243

Keywords

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Funding

  1. Strategic Research Initiative Program from the College of Engineering at the University of Illinois
  2. NSF CAREER Award [ECCS-1055941]
  3. University of Illinois
  4. U.S. Department of Energy, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering [DE-FG02-07ER46471]
  5. Directorate For Engineering
  6. Div Of Electrical, Commun & Cyber Sys [1055941] Funding Source: National Science Foundation

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We demonstrate a self-rolled-up microtube-based vertical photonic coupler monolithically integrated on top of a ridge waveguide to achieve three-dimensional (3D) photonic integration. The fabrication process is fully compatible with standard planar silicon processing technology. Strong light coupling between the vertical coupler and the ridge waveguide was observed experimentally, which may provide an alternative route for 3D heterogeneous photonic integration. The highest extinction ratio observed in the transmission spectrum passing through the ridge waveguide was 23 dB. (C) 2015 AIP Publishing LLC.

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