Nonlinear vibration of micromachined asymmetric resonators

In this paper, the nonlinear dynamics of a beam-type resonant structure due to stretching of the beam is addressed. The resonant beam is excited by attached electrostatic comb-drive actuators. This structure is modeled as a thin beam-lumped mass system, in which an initial axial force is exerted to the beam. This axial force may have different origins, e.g., residual stress due to micro-machining. The governing equations of motion are derived using the mode summation method, generalized orthogonality condition, and multiple scales method for both free and forced vibrations. The effects of the initial axial force, modal damping of the beam, the location, mass, and rotary inertia of the lumped mass on the free and forced vibration of the resonator are investigated. For the case of the forced vibration, the primary resonance of the first mode is investigated. It has been shown that there are certain combinations of the model parameters depicting a remarkable dynamic behavior, in which the second to first resonance frequencies ratio is close to three. These particular cases result in the internal resonance between the first and second modes. This phenomenon is investigated in detail. Crown Copyright (C) 2010 Published by Elsevier Ltd. All rights reserved.