Journal
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
Volume 60, Issue 1, Pages 71-80Publisher
SPRINGER
DOI: 10.1007/s10971-011-2552-2
Keywords
Sol-gel process; Photosensitive; UV-cured imprint; Reflow technique; Micro-lens arrays
Categories
Funding
- National Natural Science Foundation of China [61078058, 90923012]
- Ministry of Science and Technology of China [2009AA03Z218]
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Photosensitive TiO2-contained organic-inorganic hybrid films were prepared by combining a low-temperature sol-gel process with a spin-coating technique. Optical properties and photochemical activities of the as-prepared hybrid sol-gel films were characterized by prism coupling technique, thermal gravimetric analysis, UV-Visible spectroscopy, and Fourier transform infrared spectroscopy. Advantages for fabrication of micro-lens arrays based on the as-prepared photosensitive hybrid films were demonstrated by a direct-contact lithography technique and a reflow technique, followed by an UV-cured imprinting technique. Results indicate that the as-prepared photosensitive hybrid materials have great applicability for the fabrication of photonic components. Micro-sphere lens arrays and micro-ellipsoid lens arrays with the diameter from 20 to 100 mu m and built in the as-prepared hybrid films were obtained. Morphological and surface profile properties of the as-fabricated micro-lens arrays were characterized by scanning electron microscopy and surface profiler, respectively. Results indicate that the fabrication process of the micro-lens arrays is a simple, cost-effective and mass production process, and the as-prepared photosensitive hybrid materials have great potential applications for the fabrication of the micro-optical elements.
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