4.6 Article

Study on parylene/SiO2 composite films for protection of KDP crystals

Journal

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
Volume 45, Issue 3, Pages 319-324

Publisher

SPRINGER
DOI: 10.1007/s10971-008-1679-2

Keywords

poly(p-xylylene); SiO2 anti-reflective coating; anti-moisture films; KDP crystals

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In this paper, parylene/SiO2 composite films were reported to protect KDP crystals, indispensable cells in ICF experiments, from moisture. FTIR, UV-NIR spectra and XPS were used to analyze the properties of films. Laser damage threshold of films was also measured. With porous silica coating on surface of parylene film, the transmittance of dual layers can be raised to more than 91%. KDP crystals with poly(p-xylylene)/SiO2 coating could work well in ambient atmosphere for more than half a year.

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