A memetic algorithm to solve an unrelated parallel machine scheduling problem with auxiliary resources in semiconductor manufacturing

In this paper, we propose a metaheuristic for solving an original scheduling problem with auxiliary resources in a photolithography workshop of a semiconductor plant. The photolithography workshop is often a bottleneck, and improving scheduling decisions in this workshop can help to improve indicators of the whole plant. Two optimization criteria are separately considered: the weighted flow time (to minimize) and the number of products that are processed (to maximize). After stating the problem and giving some properties on the solution space, we show how these properties help us to efficiently solve the problem with the proposed memetic algorithm, which has been implemented and tested on large generated instances. Numerical experiments show that good solutions are obtained within a reasonable computational time.