4.6 Article

On the heating of nano- and microparticles in process plasmas

Journal

JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 44, Issue 17, Pages -

Publisher

IOP PUBLISHING LTD
DOI: 10.1088/0022-3727/44/17/174029

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Funding

  1. Deutsche Forschungsgemeinschaft (German Research Foundation) [SFB-TR24, B4]

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Determination and understanding of energy fluxes to nano- or microparticles, which are confined in process plasmas, is highly desirable because the energy balance results in an equilibrium particle temperature which may even initiate the crystallization of nanoparticles. A simple balance model has been used to estimate the energy fluxes between plasma and immersed particles on the basis of measured plasma parameters. Addition of molecular hydrogen to the argon plasma results in additional heating of the particles due to molecule recombination. The measured particle temperature is discussed with respect to appearing plasma-particle interactions which contribute to the particle's energy balance.

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