Surface energy controlled preferential orientation of thin films

The preferred crystalline orientation of magnetron sputtered transparent conducting SnO(2) : Sb thin films is controlled by the oxygen content in the sputter gas. Reducing conditions, given by a low oxygen content in the sputter gas, result in a (101) orientation, while oxidizing conditions result in a (110) orientation. The change in orientation is accompanied by a transition from reduced to oxidized surface termination and explained by the dependence of surface energy on orientation and oxygen partial pressure given in Batzill and Diebold (2005 Prog. Surf. Sci. 79 47-154).