Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 20, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0022-3727/41/20/205306
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Funding
- National Natural Science Foundation of China [50525204]
- National Key Basic Research and Development Program [2004CB619301]
- Project 985-Automotive Engineering of Jilin University
- Outstanding Young Teachers in High Education Institutions [2002359]
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The influence of oxygen on the growth of carbon nanotubes (CNTs) using plasma-enhanced chemical vapour deposition has been studied. The cobalt catalyst film and CNTs were characterized by scanning electron microscopy, transmission electron microscopy, high resolution transmission electron microscope, x-ray photoelectron spectroscopy and Raman spectroscopy. The results showed that small cobalt oxide particles obtained by O-2-etching were deoxidized back to Co catalyst particles with small size in the CH4/H-2 atmosphere for the growth of CNTs. Small Co particles and the inlet of oxygen in the stage of CNT growth enhanced the yield rate and purity of aligned CNTs.
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