Laser induced fluorescence for Ti and Ti+ density characterization in a magnetron discharge

Laser induced fluorescence (LIF) was utilized for the determination of the densities of Ti atoms and ions (Ti(+)) in a dc magnetron discharge. The densities were measured under different discharge conditions, namely the discharge current, working pressure and distance from the magnetron target. The total density of species in the discharge was calculated using additional measurements of the broadening of the absorption lines for both Ti and Ti+. The width of the absorption lines appears to be different for the neutrals and ions. To obtain the absolute values of the density measured by LIF, absorption spectroscopy measurements were used. As a result of calibration of the LIF data by the optical absorption spectroscopy the absolute value of the density of Ti atoms was found to be similar to 2 x 10(11) cm(-3) near the magnetron target at about 6 mTorr. Similar results were obtained for Ti+ ions with a maximum value of the absolute density of similar to 3 x 10(9) cm(-3).