Atomic-Resolution STEM Imaging of Graphene at Low Voltage of 30 kV with Resolution Enhancement by Using Large Convergence Angle

Atomic resolution at a low accelerating voltage with aberration correction is required to reduce the electron irradiation damage in scanning transmission electron microscopy imaging. However, the reduction in resolution caused by the diffraction limit becomes severe with increasing electron wavelength at low accelerating voltages. The developed aberration corrector can compensate for higher-order aberration in scanning transmission electron microscopy to expand the uniform phase angle. The resolution for imaging graphene at 30 kV is evaluated by changing the convergence angle for a probe-forming system with a higher-order aberration corrector. A single-carbon atom on graphene is successfully imaged at atomic resolution with a cold-field emission gun by dark-field imaging at an accelerating voltage of 30 kV.