☆ 4.0 Article

Approach for High Aspect Ratio Pattern Transfer by Nanoimprint Lithography using Mixture Polymers of Molecular Weights

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY (2013)

Journal

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Volume 26, Issue 1, Pages 97-103

Publisher

Technical Association of Photopolymers, Japan

DOI: 10.2494/photopolymer.26.97

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Categories

Polymer Science

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