3.9 Review

Plasmonic components fabrication via nanoimprint

Journal

Publisher

IOP PUBLISHING LTD
DOI: 10.1088/1464-4258/11/11/114001

Keywords

plasmonics; surface plasmon-polaritons; nanofabrication; nanolithography; nanoimprint lithography; plasmonic waveguides

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Funding

  1. Danish Research Council for Technology and Production Sciences [274-07-0057]
  2. SAOT Young Researcher Award
  3. Erlangen Graduate School in Advanced Optical Technologies (SAOT)

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A review report on nanoimprinted plasmonic components is given. The fabrication of different metal-dielectric geometries and nanostructured surfaces that support either propagating or localized surface plasmon modes is discussed. The main characteristics and advantages of the nanoimprint technology for the fabrication of various plasmonic structures are outlined. The discussion of plasmonic waveguiding structures focuses on planar waveguides based on metal strips embedded into a dielectric and on profiled metal surfaces. Nanoimprint-based fabrication of two-dimensional nanostructured plasmonic surfaces for enhanced transmission studies and sensor applications is also discussed. Throughout the report, the main fabrication schemes are described, as well as the challenges facing future manufacturing of plasmonic components for device applications.

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