Journal
JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS
Volume 10, Issue 6, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1464-4258/10/6/064001
Keywords
phase shifting interferometry; white light measurement; shape; film thickness; dynamic motion; cell; through media measurement
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Interferometric optical profilers deliver non-contact, fast, full-field measurements with vertical resolution down to a fraction of a nanometer. Over the last decade advancements to these instruments have allowed for the analysis of not only static but also dynamic objects, like cantilevers and other microelectromechanical system devices, moving or vibrating at up to 1 MHz frequencies. Special objectives and illumination allow for imaging and testing of objects enclosed in environmental or protective chambers or immersed in liquids-including biological samples. Advanced analysis of the interference signal allows for the measurement not just of the surface profile but also transparent coatings.
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