Journal
JOURNAL OF NUCLEAR MATERIALS
Volume 446, Issue 1-3, Pages 200-207Publisher
ELSEVIER
DOI: 10.1016/j.jnucmat.2013.12.008
Keywords
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Funding
- National Magnetic confinement Fusion Science Program [2010GB104002]
- National Natural Science Foundation of China [10975035]
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The influence of the deposition conditions on the surface morphology, crystal structure and deuterium retention of the tungsten layers formed by rf magnetron plasma sputtering in mixed atmosphere of D-2, He and Ar, has been carried out. Helium containing deuterated tungsten layers (named He-WDx) on Cu/Si substrate demonstrate serious film damages with zones of cracks, fractures, flaking-off and large surface blisters. However, these kinds of damages do not happen on the He-WDx layers performed on mechanically polished polycrystalline Cu substrates because of larger surface roughness of the substrates. The crystal structure of the W layer greatly changes with the additional He in the layer, and large amounts of defects resulting in lattice expansion and X-diffraction peak broadening were produced in the W crystal. He in the W layer has direct impacts on D retention. Both D and He concentrations vary simultaneously with He fraction, attached negative bias and substrate temperature. Crown Copyright (C) 2013 Published by Elsevier B.V. All rights reserved.
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