SDTrimSP-2D studies of the influence of mutual flux arrangement on erosion and deposition

In this work, simultaneous bombardment of a nano-scale rough tungsten surface with 6 kV carbon and 3 keV deuterium ions is investigated by simulations with SDTrimSP and SDTrimSP-2D and compared with experiments. For same bombardment conditions a rough surface produces higher sputter yields and at the same time higher areal densities of implanted C than in the case of a smooth surface. For co-axial flux arrangement bombarding a rough surface under 45, the surface tends to prevent W sputtering by aligning the surface profiles to the perpendicular and parallel directions of the impinging C and D ion fluxes. (C) 2009 Elsevier B.V. All rights reserved.