Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume 212, Issue 3, Pages 535-540Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.201400084
Keywords
metrology; modulated photothermal radiometry; thermal conductivity; thin films
Funding
- European Metrology Research Programme (EMRP) Project Thin Films [IND07]
- EMRP participating countries within EURAMET
- European Union
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A new metrological facility devoted to the thermal conductivity measurements up to 1000 degrees C for thin films (from few tens nanometers to few micrometers thick) deposited on substrate has been recently designed at LNE. Its measurement principle is based on the infrared modulated photothermal radiometry technique (MPTR). This device has been applied to the thermal characterization of industrially relevant chalcogenide thin films (Ge2Sb2Ti5) up to 400 degrees C. This work, performed in the frame of the European joint research project Thin Films, seeks to improve the traceability to the International System of Units (SI) as well as the reliability of this type of measurements at submicrometer scale. (C) 2015 WILEY - VCH Verlag GmbH & Co. KGaA, Weinheim
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