Photocatalytic Activity of Metal-Inserted WO3 Thin Films Prepared by RF Magnetron Sputtering

Metal (Au,Pt)-inserted WO3 thin films were deposited on quartz glass using a radio frequency magnetron sputtering method. Their structural and optical properties were analyzed by scanning electron microscopy, X-ray diffractometry, absorption spectrometry, and photoluminescence spectrometry. The photocatalytic activities of the films were investigated by the measurement of photodecomposition of methylene blue under visible-ray irradiation. Metal-inserted WO3 films showed higher photocatalytic activity than WO3 film. Pt-inserted WO3 thin film showed the most effective decomposition efficiency, it is due to the high absorption and the suppression of recombination between photo-excited electrons and holes.