Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 8, Issue 5, Pages 2560-2567Publisher
AMER SCIENTIFIC PUBLISHERS
DOI: 10.1166/jnn.2008.634
Keywords
piezoelectric; thin films; MEMS or microsystems; transducers
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Piezoelectric thin films have interesting prospects in a number of applications for which miniaturization is a driving force. Miniaturization means higher frequency, or higher resolution, or increased functionality. This paper gives a short review on piezoelectric thin films, their deposition processes, integration, properties and applications in microsystems (MEMS), concentrating on the most frequently investigated piezoelectric thin film materials.
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