Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 8, Issue 10, Pages 5571-5575Publisher
AMER SCIENTIFIC PUBLISHERS
DOI: 10.1166/jnn.2008.1352
Keywords
Carbon Nanotube; Block Copolymer; PECVD
Categories
Funding
- Korea Institute of Industrial Technology(KITECH) [M2007010003] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [R0A-2008-000-20057-0, R11-2000-085-08004-0, 14-2008-00-005-00] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Highly uniform vertical carbon nanotube arrays were prepared by a novel hybrid approach combining a plasma-enhanced chemical vapor deposition (PECVD) process with self-assembled block copolymer nanotemplate. Monodisperse catalyst nanoparticles were prepared on a substrate using self-assembled nanoporous block copolymer templates. The subsequent PECVD growth of vertical CNTs from the nanopatterned catalyst particles provided highly oriented vertical CNT arrays, which are potentially useful for device integration of CNTs.
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