Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 24, Issue 7, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/24/7/075019
Keywords
high aspect ratio; injection; moulding; molding; nanopillar; nanoimprint
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Funding
- EPSRC
- EC [FP7-CP-IP 214249-2]
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Replication-based nanofabrication techniques offer rapid, cost effective ways to produce nanostructured devices for a host of applications in engineering, biological research and beyond. In this work we developed a method to replicate ultra high aspect ratio (UHAR) nanopillars by injection molding with failure rates lower than one pillar in a thousand. We provide a review of the literature in which replication of difficult micro-and nanostructures is facilitated through the use of different tooling materials and surface coatings, before describing the non-adhesive surface coatings which we used to translate a previously developed technique from low to high aspect ratios. This development involved a systematic study of nine different surface coatings on polymer tooling initially patterned by nanoimprint lithography. Using this method we were able to produce injection moulded pillar-like nanostructures with aspect ratios of up to 20:1, more than 6 times that reported elsewhere in the literature for this type of feature.
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