Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 24, Issue 9, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/24/9/095003
Keywords
EHD micropump; carbon electrode; micromesh; SU-8 pyrolysis
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Funding
- Japan Ministry of Education, Culture, Sports Science and Technology (MEXT) [23226010]
- MEXT Nanotechnology Platform Support Project of Waseda University
- Grants-in-Aid for Scientific Research [23226010] Funding Source: KAKEN
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An electrohydrodynamic (EHD) ion-drag micropump using three-dimensional carbon micromesh electrodes was developed. The carbon micromesh electrodes were created by the pyrolysis of SU-8 structures. The carbon electrodes and microchannel were formed on a quartz substrate, and the microchannel was sealed by an SU-8 slab structure. The pumping behaviors were evaluated using Fluorinert as a non-conductive sample solution. The maximum pressure and volume flow rate were approximately 23 Pa and 400 nL/min, respectively, under an applied voltage of 500 V.
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