Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 3, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/23/3/035005
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Funding
- EU Seventh Framework Programme [247868-FP7-ICT-2009-4]
- Engineering and Physical Sciences Research Council (EPRSC) [EP/J008052/1]
- Engineering and Physical Sciences Research Council [EP/G060363/1, EP/J008052/1] Funding Source: researchfish
- EPSRC [EP/J008052/1, EP/G060363/1] Funding Source: UKRI
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Commercial digital multimirror devices offer a cheap and effective alternative to more expensive spatial light modulators for ablation via beam shaping. Here we present femtosecond laser ablation using the digital multimirror device from an Acer C20 Pico Digital Light Projector and show ablation of complex features with feature sizes ranging from sub-wavelength (400 nm) up to similar to 30 mu m. Simulations are presented that have been used to optimize and understand the experimentally observed resolution.
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