Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 3, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/23/3/035002
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Funding
- National Science Foundation (NSF) [0622036]
- Div Of Electrical, Commun & Cyber Sys
- Directorate For Engineering [0622036] Funding Source: National Science Foundation
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A low-cost nano-gap interdigitated electrode array (IDA) on a polymer substrate has been developed to realize a disposable nano-biosensor for biochemical clinical analysis. Utilizing the common instruments for optical lithography, nano-scale features were fabricated on a thermoplastic polymer to produce an electrochemical nano-biosensor in a disposable format. The IDA was realized on a 3-inch cyclo-olefin copolymer wafer, which illustrates the utility of our fabrication technique as a large-area nanofabrication process for a polymer using low temperature processes. In order to demonstrate the use of the sensor for lab-on-a-chip applications, the developed IDA was integrated with a microfluidic channel and applied for the electrochemical detection of poly-aminophenol with 10(-8) M detection limit. The results indicate the developed fabrication technique is suitable for the inexpensive mass fabrication of highly sensitive nano-biosensors for disposable applications.
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