Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 12, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/23/12/125027
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Funding
- Broadening Participation Research Initiation Grants program of the National Science Foundation [0926228]
- Focus Center for Functional Engineered Nano Architectonics
- Directorate For Engineering [0926228] Funding Source: National Science Foundation
- Div Of Electrical, Commun & Cyber Sys [0926228] Funding Source: National Science Foundation
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This work presents for the first time a zeolitic imidazolate framework (ZIF)-coupled resonant gas sensor whose sensitivity shows an improvement up to 78 times over bare silicon resonant sensors with identical dimensions. ZIFs are among the highest surface area material used for resonant-based sensing. We utilize high surface area-to-volume ratios of ZIFs to demonstrate how a microresonator coupled with ZIF crystals can provide high sensitivity to chemical vapors.
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