Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 12, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/22/12/125001
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Funding
- EPSRC [EP/D055881/1]
- Foundation for Science and Technology of Portugal [SFRH/BPD/27013/2006]
- FCT [PTDC/CTM/099489/2008]
- EPSRC [EP/D055881/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/D055881/1] Funding Source: researchfish
- Fundação para a Ciência e a Tecnologia [SFRH/BPD/27013/2006] Funding Source: FCT
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A modified gel-casting technique was used to fabricate a 1-3 piezoelectric ceramic/polymer composite substrate formed by irregular-shaped pillar arrays of small dimensions and kerfs. This technique involves the polymerization of aqueous piezoelectric (PZT) suspensions with added water-soluble epoxy resin and polyamine-based hardener that lead to high strength, high density and resilient ceramic bodies. Soft micromoulding was used to shape the ceramic segments, and micropillars with lateral features down to 4 mu m and height-to-width aspect ratios of similar to 10 were achieved. The composite exhibited a clear thickness resonance mode at approximately 70 MHz and a k(eff) similar to 0.51, demonstrating that the ceramic micropillars possess good electrical properties. Furthermore, gel-casting allows the fabrication of ceramic structures with non-conventional shapes; hence, device design is not limited by the standard fabrication methods. This is of particular benefit for high-frequency transducers where the critical design dimensions are reduced.
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